イオンビーム蒸着

イオンビーム蒸着（IBD）システムによって、均一性と再現性を最大限に高める、極めて精密で高純度の薄膜層デバイスを生み出します。

Veeco’s Frank Cerio, Ph.D., a leading process development engineer, presented at the IEEE International Interconnect Technology Conference (IITC). The presentation, Microstructural Optimization of Tungsten for Low Resistivity Using Ion Beam Deposition, was also presented as a poster. Watch now: