Veeco Ships First Laser Annealing System From New San Jose Manufacturing Facility Designed to Serve the Semiconductor Market

ニュース | Nov 22, 2021

PLAINVIEW, N.Y. — Veeco Instruments Inc. （NASDAQ：VECO) today announced they have shipped the first LSA101 Laser Spike Annealing System from their new San Jose, California facility to a leading semiconductor manufacturer. Veeco’s new, SEMI-compliant facility serves as the company’s center of excellence for the development and production of laser annealing and advanced packaging lithography systems for semiconductor applications.

“We are extremely proud to be shipping our first LSA system from our state-of-the-art facility in the heart of Silicon Valley,” commented Bill Miller, Veeco’s Chief Executive Officer. “Aligned with the company’s growth strategy, this new manufacturing space enables Veeco to serve the world’s leading semiconductor chip providers with increased capacity and world-class lab space. We look forward to showcasing this flagship location to our laser annealing and advanced packaging lithography customers for years to come. Thank you to the Veeco team that worked diligently on an accelerated timeline to enable this exciting milestone in Veeco’s history.”

Veeco’s new facility features approximately 70,000 square-feet of manufacturing and engineering lab space and 30,000 square-feet of office space. Manufacturing space will be nearly double that of Veeco’s previous San Jose facility and will improve manufacturing efficiency. The new facility is specifically designed to meet growing demand for Veeco’s laser annealing and advanced packaging lithography technologies.

Peter Porshnev, Ph.D., Veeco’s Senior Vice President, United Engineering (center) is joined by colleagues to celebrate the first tool shipment from the new San Jose facility.

Advanced semiconductor device scaling requires higher temperature for dopant activation with shorter time at temperature to avoid dopant diffusion. Veeco’s patented LSA101® and LSA201® Laser Spike Annealing (LSA) Systems deliver the highest temperatures in the microsecond time scale. The unique nature of the LSA platform enables our customers to anneal complex patterns with high temperature uniformity and precision, which is highly desired in advanced device processing.

Veecoについて
Veeco (NASDAQ: VECO) is an innovative manufacturer of semiconductor process equipment. Our proven ion beam, laser annealing, lithography, MOCVD and single wafer etch & clean technologies play an integral role in the fabrication and packaging of advanced semiconductor devices. With equipment designed to optimize performance, yield and cost of ownership, Veeco holds leading technology positions in the markets we serve. To learn more about Veeco’s systems and service offerings, visit www.veeco.com.

Veeco Contacts
Investors: Anthony Bencivenga | (516) 252-1438 | abencivenga@veeco.com
Media: Kevin Long | (516) 714-3978 | klong@veeco.com

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