湿式処理システム
持続可能な慣行による表面処理は、自動車分野への応用、医療機器、5G、およびクラウド ストレージ向けの最先端のマイクロエレクトロニクスの信頼性を確保するためには、決定的に重要です。
Wet Processing Application Suite:
WaferStorm Platform
- Metal Lift-Off
- Photoresist/Dry Film Strip
- Flux Clean
- Scrubber
- TSV Clean
WaferEtch Platform
- UBM/RDL Etch
- Compound Semiconductor Etch and Silicon Thinning
Making a Material Difference with Wet Process Technology:
- High uniformity combined with low defectivity
- Flexible design to meet a wide range of process requirements
- Proprietary immJET technology combines batch immersion and single wafer spray processing
The WaferStorm platform is the industry choice for a number of critical solvent-based processes in the advanced packaging, MEMs,…
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The WaferEtch platform is the industry choice for a number of critical aqueous-based processes in the advanced packaging, MEMs,…
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