VeecoがGENxplor 分子線エピタキシー システムを発表
Product News | Aug 19, 2013
Industry’s First Fully-Integrated MBE System for the Compound Semiconductor R&D Market
PLAINVIEW, N.Y.–(BUSINESS WIRE)–Aug. 19, 2013– Veeco Instruments Inc. （NASDAQ：VECO) today introduced the GENxplor™ Molecular Beam Epitaxy (MBE) Deposition System , the industry’s first fully-integrated MBE system for the compound semiconductor R&D market. GENxplor は、基板上に最大直径3インチの高品質のエピタキシャル層を作成し、GaAs、窒素、酸素を含むさまざまな物質に関する最先端の研究に最適です。
Veeco’s New GENxplor R&D MBE System (Photo: Business Wire)
“The compound semiconductor R&D community asked for a more affordable, flexible, and easy-to-use MBE system and Veeco has delivered with the GENxplor,” commented Jim Northup, Veeco’s Vice President and General Manager. “We have repackaged Veeco’s industry-leading MBE technology into a novel ‘all-in-one’ design that combines the reactor and electronics on a single frame. It will change the way researchers use MBE.”
The GENxplor uses Veeco’s proven GEN10™ growth chamber design and features unmatched process flexibility, ideal for materials research on emerging technologies such as UV LEDs, high-efficiency solar cells, and high-temperature superconductors. すべての真空ハードウェアを内蔵電子回路と統合した効率的な単一フレーム設計により、他の MBE システムと比べて 40% の小型化を実現し、貴重な研究室のスペース節約に貢献します。また、この手動システムは単一フレームに統合されており、従来より短い時間での設置が可能です。The open architecture design of the GENxplor also improves ease-of-use, provides convenient access to effusion cells, and allows easier serviceability when compared to other MBE systems. 当社がすでに発表した格納式ソースと組み合わせて、酸化物材料研究に最新鋭の GENxplor システムをご活用ください。
In recognition of the growing influence and importance of China in the field of MBE research, Veeco is launching the GENxplor at this week’s China MBE Conference in Shanghai. For more information on the GENxplor, please visit us at the China MBE Conference or go to www.veeco.com/genxplor .
Veecoについて
Veeco のプロセス装置ソリューションは、LED、パワー エレクトロニクス、ハード ドライブ、MEMS、および無線チップの製造を可能にします。当社は、MOCVD、MBE、イオン ビーム、その他の先進的な薄膜プロセス技術市場のリーダーです。当社の高性能システムは、エネルギー効率、家電製品、およびネットワーク記憶装置に革新をもたらします。また、お客様の生産性の最大化と所有コストの低減を実現します。For information on our company, products and worldwide service and support, please visit www.veeco.com .
To the extent that this news release discusses expectations or otherwise makes statements about the future, such statements are forward-looking and are subject to a number of risks and uncertainties that could cause actual results to differ materially from the statements made. These factors include the risks discussed in the Business Description and Management’s Discussion and Analysis sections of Veeco’s Annual Report on Form 10-K for the year ended December 31, 2011 and in our subsequent quarterly reports on Form 10-Q, current reports on Form 8-K and press releases. Veeco does not undertake any obligation to update any forward-looking statements to reflect future events or circumstances after the date of such statements.
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Source: Veeco Instruments Inc.
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